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TGV Cleaner & Etcher

TGV Cleaner & Etcher
Semiconductor Solutions
TGV Cleaner & Etcher

Equipment that removes fine glass particles and chemical residues generated during glass substrate processing, as well as contaminants inside laser-formed via holes, and precisely shapes the via holes through wet etching.

SEMICONDUCTOR SOLUTIONS
TGV Cleaner & Etcher
SPECIFICATION
  • Glass size
    Custom
  • Process
    Etching
  • AP Field
    TGV Glass
  • Unit Composition
    Custom
  • Chemical
    Custom
FEATURES

Designed to process multiple glass substrates simultaneously for maximum productivity, the equipment uniformly removes surface contaminants at the cleaning stage to ensure cleanliness and precisely forms TGV via holes through wet etching to ensure packaging reliability.