사업소개

FA사업부

제품소개

제목 : Fine Metal Mask AOI

순번
63
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관리자
작성일
2019-06-11
조회수
3,172
첨부파일

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FMM AOI Spec.

  • 1. Substrate Size: ½ 6G
  • 2. AOI Camera System :3~7um Resolution TDI Sensor
  • 3. Tact Time : 200sec/Mask (½ 6G Case)
    • ⓛ AOI Inspection
  • 4. Optional Repair Unit
    • ⓛ UV QCW Laser for Defect Burning
      ② nS Pulse Laser

FMM AOI Process → Defect Detection

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FMM AOI Process → Macro Detection

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Pattern Shift(Align), Apheun Inspection

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SMEC Inspector System.

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Inspection Flow

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  • Compute Unified Device Architecture
  • GPGPU Access Platform
  • Hardware
  • NVIDIA GPGPU Board

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